The 2-Minute Rule for Tantalum sputtering targets
The 2-Minute Rule for Tantalum sputtering targets
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Sweeping the lean angle can strengthen movie thickness uniformity and sidewall protection even though also staying away from high Electricity-reflected neutral species for crucial processes.
In-situ optical checking and control is offered through Angstrom’s optical monitoring & Command bundle.
Target rotation and carousel indexing Each and every have torque feeling, blocking any method challenges on account of slips or jams in rotation.
The size, placement, and equipment ratio of every Earth are optimized to provide the very best doable movie thickness uniformity.
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If it’s off by even fifty percent a degree, it's going to have an effect on the morphology of such nanostructures considerably.
Angstrom Engineering® styles and engineers Every single Reticle® System to provide our partners in High-temperature metal components the optics Neighborhood the opportunity to develop the films they want with great purity, density, and uniformity, all inside a very repeatable and automatic trend.
Our distinctive design permits immediate or indirect checking of the variable angle phase, reducing the need for tooling variables or a witness glass changer. Find out more concerning the Optical Checking & Management bundle right here.
IBSD processes may also hire a secondary ion resource for substrate cleaning and energetic aid, substrate heating for reactive deposition, and in-situ optical checking or ellipsometry for important layer thickness termination.
All regular Reticle® platforms involve a further gridless conclude-Hall ion source with hollow cathode neutralizer.
1 degree. Those beautifully narrow tolerances make it possible for us to regularly make extremely precise nanostructures. I'm able to say wholeheartedly the merchandise and repair Angstrom Engineering® delivered is remarkable.
Self-aligned ion optics are configured especially for the desired deposition requirements and geometry of your respective process.
A lower-frequency neutralizer makes certain steady beam operation with out contamination from a traditional filament.
A shuttered QCM Found near the substrate supplies comments to the deposition fee and physical thickness from the developing movie.
Just about every axis of movement is controlled by Aeres® applying precision servo motors, giving better than 0.one degrees of positional accuracy. Front aspect infrared heating bulbs tilt With all the stage to offer a reliable temperature profile for reactive processes.